Visual Inspection


Chip Inspection System

For side wall inspection of semiconductor chips as well as for the inspection of coated facets the ficonTEC IL2000 is the dedicated machine. The fully automatic machine acquires high resolution pictures of the surfaces of interest and performs
optical inspections based on the user’s criteria. A top and bottom side inspection module can be added to this system as well as different material feeding philosophies.

Fields of Use

  • Side wall inspection of semiconductor chips
  • Facet inspection of laser diodes
  • Coating quality control
  • Surface inspection
  • Die Sorting

Key Features

  • Crack recognition
  • Break-out detection
  • Prognosis of crack propagation
  • Particle recognition
  • Dust and fiber identification
  • Detailed component/batch/lot tracking
  • Individual error catalogue handling

System Set-Up

  • High magnification imaging system
  • Color camera for individual color channel examination
  • Köhler illumination
  • Flashlamp white light exposure
  • 20x microscope optics (50x optional)
  • Dedicated vision processing server
Wafer Processing

ProcessControlMaster software

All ficonTEC machines are shipped as turn-key systems. Beside the motion system the packages include the control unit consisting of motion controllers, motion amplifiers and a ready to use programming and control interface. The ProcessControlMaster software features an intuitive line based programming GUI including powerful alignment routines and is completely equipped for full assembly or testing automation. The ProcessControlMaster software is the software which also operates our assembly and testing machines.

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